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Other articles related with "etch-stop barrier"：
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47104 |
Min-Han Mi(宓珉瀚), Sheng Wu(武盛), Ling Yang(杨凌), Yun-Long He(何云龙), Bin Hou(侯斌), Meng Zhang(张濛), Li-Xin Guo(郭立新), Xiao-Hua Ma(马晓华), Yue Hao(郝跃) |
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In-situ SiN combined with etch-stop barrier structure for high-frequency AlGaN/GaN HEMT |
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Chin. Phys. B
2020 Vol.29 (4): 47104-047104
[Abstract]
(665)
[HTML 1 KB]
[PDF 1157 KB]
(177)
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